# ASML EUV TwinScan at Phoenix, Arizona, USA: deployment

Canonical ID: `b7058650-9439-414b-9285-d3a1fe22de41`

TSMC Arizona fab uses ASML EUV lithography.

**Trust tier:** Catalog entry · 1 source · not yet field-verified

_Last updated: 2026-09-12_

- **Slug:** asml-euv-twinscan-phoenix-arizona-usa
- **Status:** operational
- **Model:** [ASML EUV TwinScan](/models/asml-euv-twinscan.md) (id: `84088067-bd7c-4b7c-8d8a-a980110c0379`)
- **Company:** [ASML Holding](/companies/asml-holding.md) (id: `498c86e8-4d30-47b6-9f83-19a2aad91450`)
- **Location:** [Phoenix, Arizona, USA](/locations/phoenix-arizona-usa.md) (id: `07bb3fd5-168c-46fa-a6c3-fb5a9f00d0c2`)
- **First seen:** 2022-12-01T00:00:00.000Z

## Verification log (0, append-only)

_No verifications recorded._

## Sources (1)

1. https://en.wikipedia.org/wiki/TSMC_Arizona

## Common questions

### What is the ASML EUV TwinScan deployment at Phoenix, Arizona, USA?

ASML EUV TwinScan, built by ASML Holding, is recorded as a deployment at Phoenix, Arizona, USA on the DEPLOY registry. ASML Holding operates the deployment directly.

### Who operates ASML EUV TwinScan at Phoenix, Arizona, USA?

ASML Holding, the manufacturer of ASML EUV TwinScan, operates this deployment directly. This is a maker-deploys-its-own-product arrangement rather than a customer pilot.

### When did the ASML EUV TwinScan deployment at Phoenix, Arizona, USA go live?

The deployment is recorded as starting December 1, 2022 on the DEPLOY registry. Earlier activity may exist but is not yet sourced.

### Have there been incidents at the ASML EUV TwinScan deployment at Phoenix, Arizona, USA?

No active incidents affecting this deployment are recorded on the DEPLOY registry. Absence of recorded incidents is not a guarantee no incident occurred; DEPLOY records only sourced incidents and suppresses retracted ones.


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