# ASML EUV TwinScan at Tainan Science Park, Taiwan: deployment

Canonical ID: `c6c02840-e9d8-48b2-91a8-8046ad195ef2`

TSMC Fab 18 (3nm) EUV deployment at Tainan Science Park.

**Trust tier:** Unverified

_Last updated: 2026-09-07_

- **Slug:** asml-euv-twinscan-tainan-city-taiwan
- **Status:** operational
- **Model:** [ASML EUV TwinScan](/models/asml-euv-twinscan.md) (id: `84088067-bd7c-4b7c-8d8a-a980110c0379`)
- **Company:** [ASML Holding](/companies/asml-holding.md) (id: `498c86e8-4d30-47b6-9f83-19a2aad91450`)
- **Location:** [Tainan Science Park, Taiwan](/locations/tainan-city-taiwan.md) (id: `c34b2c1a-2d76-4600-aaa8-e862e5371bdd`)
- **First seen:** 2020-01-01T00:00:00.000Z

## Verification log (0, append-only)

_No verifications recorded._

## Sources (1)

1. https://en.wikipedia.org/wiki/TSMC

## Common questions

### What is the ASML EUV TwinScan deployment at Tainan Science Park, Taiwan?

ASML EUV TwinScan, built by ASML Holding, is recorded as a deployment at Tainan Science Park, Taiwan on the DEPLOY registry. ASML Holding operates the deployment directly.

### Who operates ASML EUV TwinScan at Tainan Science Park, Taiwan?

ASML Holding, the manufacturer of ASML EUV TwinScan, operates this deployment directly. This is a maker-deploys-its-own-product arrangement rather than a customer pilot.

### When did the ASML EUV TwinScan deployment at Tainan Science Park, Taiwan go live?

The deployment is recorded as starting January 1, 2020 on the DEPLOY registry. Earlier activity may exist but is not yet sourced.

### Have there been incidents at the ASML EUV TwinScan deployment at Tainan Science Park, Taiwan?

No active incidents affecting this deployment are recorded on the DEPLOY registry. Absence of recorded incidents is not a guarantee no incident occurred; DEPLOY records only sourced incidents and suppresses retracted ones.


_API: GET /v1/robots/c6c02840-e9d8-48b2-91a8-8046ad195ef2 · feeds: GET /v1/feeds?deploymentId=c6c02840-e9d8-48b2-91a8-8046ad195ef2 · canonical URL: /deployments/asml-euv-twinscan-tainan-city-taiwan_