Patent
WO2000033359A2
Specimen holding robotic arm end effector for wafer handling in semiconductor manufacturing. Assigned to Mitsubishi Electric Corporation.
WIPO · pending
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Key facts
- Jurisdiction
- wipo
- Status
- pending
- Number
- WO2000033359A2
- Filing date
- 1998-07-15
- Verification posture
- reported
Parties (1)
- assignee · Mitsubishi Electric Corporation (reported)
Sources (1)
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Identity
205fb163-eb6b-4dd7-8b99-e2ae78f0a4be